Solid State Technology MEMS Direct| January 17, 2012 |View online
Small Times MEMS Direct | January 17, 2012

In this issue:
• MEMS microphones make noise in 2012
• RF MEMS tuned for growth, shows smartphone win
• MEMS sensors in integrated smart systems
• MEMS die size grows, test evolves, and other trends
• Multitest ships first MEMS MT9510 test tool
• Ushio litho tool for MEMS features new lens module
• AMAT image sensor CVD processes at low temps
• ULVAC CVD-Co, -Ni system suits 3D gate, MEMS fab
• Who supplies Apple? The 150+ company list
• Energy harvesting powers up commercially
• Color displays could boost e-reader sales
• MEMS combo sensors benefit auto, consumer sectors
• Bosch fabs 2B MEMS sensors
• Tronics wins MEMS fab contract from DelfMEMS
• JCAP, Enpirion partner on MEMS manufacturing
• NASA grants BMC contract to refine microfabrication process
Top stories
MEMS microphone report, IHS.
MEMS microphones make noise in 2012
MEMS microphones will find continued strong implementation in phones, laptops, and tablets in the future, shows Jeremie Bouchaud, IHS, sharing shipment and revenue forecasts through 2015.
RF MEMS report, IHS.
RF MEMS tuned for growth, shows smartphone win
The new Samsung Focus Flash Windows smartphone includes a WiSpry RF MEMS device, starting off a 200x expansion of the RF MEMS industry through 2015, the analyst firm IHS predicts.
-WiSpry confirms RF-MEMS tech is in mass-produced handset
-Cornell, SRC develop RF MEMS technologies
MEMS in smart systems, ST.
MEMS sensors in integrated smart systems
Embedded features and sensor integration will determine the future applications of MEMS sensors. Jay Esfandyari et al, STMicroelectronics, share an overview of future trends of sensor integration -- sensor fusion -- and some of the features available today in digital MEMS inertial sensors.
-STM: Semiconductor maker, MEMS specialist, venture capitalist?
MEMS die size, trends report, Yole.
MEMS die size grows, test evolves, and other trends
Yole studies the evolution of inertial MEMS and magnetometers and provides reverse costing analysis of the MEMS devices in "Technology Trends for Inertial MEMS." The report considers 23 MEMS devices.
-MEMS: The year past and the year ahead
Fab & test equipment
Multitest MEMS tester.
Multitest ships first MEMS MT9510 test tool
Multitest shipped the first Multitest MEMS equipment for the MT9510 pick-and-place test handler to an IDM in the US. The IDM will perform MEMS gyroscope testing.
Ushio litho tool for MEMS features new lens module
USHIO Inc. is introducing the UX4-MEMS FFPL 200 with the overlay accuracy of 0.5um for manufacturing MEMS devices, mounted with the newly developed lens module having a maximum depth of focus of 500um and the auto mask changer module for manufacturing multiple device types.
AMAT image sensor CVD processes at low temps
Applied Materials Inc. (AMAT) launched the Applied Producer Optiva chemical vapor deposition (CVD) system for back-side-illuminated (BSI) image sensor manufacturing. It deposits low-temperature conformal films that boost the low-light performance of the sensor while improving its durability.
ULVAC CVD-Co, -Ni system suits 3D gate, MEMS fab
ULVAC Inc. developed the ENTRONTM-EX2 W300 CVD-Ni/CVD-Co system for CVD-Ni and CVD-Co silicidation of 3D semiconductor gates and MEMS. The system is a response to a semiconductor industry transition from PVD to CVD in advanced 3D gate structure film step coverage, ULVAC reports.

MEMS applications
Apple Inc. logo.
Who supplies Apple? The 150+ company list
For the first time, Apple Inc. has publicly published a list of over 150 companies that the electronics giant says represent 97% of its procurement expenditures for materials, manufacturing, and assembly of products worldwide.
Energy harvesting powers up commercially
The analysts at IDTechEx look at the year past and the year ahead for energy harvesting devices, such as rising power in piezoelectric harvesters and other trends.
-imec presents MEMS energy harvester at IEDM
Color displays could boost e-reader sales
Displays for pure-play e-book readers will see 108% higher shipments in 2011, but slower growth ahead. In the future, e-reader makers will turn to color display technologies, predicts IHS iSuppli.
-Qualcomm MEMS reports 2 e-reader design wins in China
MEMS combo sensors benefit auto, consumer sectors
Combo sensors, comprising MEMS accelerometers, gyroscopes, or electronic compasses, are filling a need in consumer and automotive applications. Combined revenue from these sectors will grow by a factor of 50 over 5 years, shows IHS iSuppli.
MEMS fab news
Bosch fabs 2B MEMS sensors
After taking 13 years to fab its first 1 billion MEMS sensors, Bosch has added another billion in just 3 years. The company's MEMS sensor production is nearing half a billion a year.
Tronics wins MEMS fab contract from DelfMEMS
DelfMEMS SA named Tronics as its MEMS foundry partner. Tronics will manufacture RF MEMS switches for DelfMEMS, with high-capacity runs starting in 2012.
JCAP, Enpirion partner on MEMS manufacturing
Enpirion, Inc. entered into a strategic partnership agreement with JiangyinChangdian Advanced Packaging Co., Ltd. (JCAP) for the manufacturing of silicon-based magnetics utilizing Enpirion's proprietary micro electronic magnetic silicon (MEMS) technology.
NASA grants BMC contract to refine microfabrication process
Boston Micromachines Corporation will use a NASA contract to develop better microfabrication processes for deformable mirrors, which will be used in exoplanet imaging research.
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Web Editor
Shannon Davis
603-891-9145
shannond@pennwell.com


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